Mechanical Characterization of Anodic Bonding Using Chevron Microchannel

Citation: 
Woodrum, D.C., Nasr, M., Zhang, X., Bakir, M.S. and Sitaraman, S.K., “Mechanical Characterization of Anodic Bonding Using Chevron Microchannel,” 67th Electronic Components and Technology Conference, IEEE-CPMT and EIA, Lake Buena Vista, FL, May 2017, pp. 1646-1653.