Nano-spring arrays for high density interconnect

Citation: 
Fork, D. K., Chua, C. L., Kim, P., Romano, L. T., Lau, R., Wong, L., Alimonda, A., Gelaz, V., Teepe, M., Haemer, J., Modi, M., Zhu, Q., Ma, L., Sitaraman, S. K., Smith, D. L., and Mok, S., “Nano-spring arrays for high density interconnect”, Proceeding of International Optical Engineering Society (SPIE), Micromachined Devices and Components VI, Santa Clara, CA, USA, September, 2000 (invited).