Materials and mechanics challenges in SOP-based convergent Microsystems

Citation: 
Pucha, R.V., Sitaraman, S.K., Hegde, S., Damani, M., Wong, C.P., Qu, J., Zhang, Z., Raj, P.M., Tummala, R.R., “Materials and mechanics challenges in SOP-based convergent Microsystems,” Micromaterials and Nanomaterials, A publication series of the Micro Materials Center Berlin at the Fraunhofer Institute IZM, Issue No. 3, 2004, pp.16-29 (invited).