Characterization of Mechanical Properties of Thin Films by Nanoindentation Technique and Finite Element Simulation

Citation: 
Shan, Z and Sitaraman, S.K (2002). Characterization of Mechanical Properties of Thin Films by Nanoindentation Technique and Finite Element Simulation. Proceedings of the ASME International Mechanical Engineering Congress and Exposition, November 17-22, 2002, New Orleans, LA, IMECE2002/EPP-39668.