Interfacial fracture characterization of nano-scale thin films using single-strip stress-engineered superlayer

Citation: 
Zheng, J. and Sitaraman, S. K., “Interfacial fracture characterization of nano-scale thin films using single-strip stress-engineered superlayer,” IMECE2006-ASME, November 2006, Chicago, IL, USA, IMECE2006-13504.