Role of Base Substrate Material on Dielectric and Copper Interlayer Separation

Citation: 
Xie, W., Hu, H., and Sitaraman, S. K., “Role of Base Substrate Material on Dielectric and Copper Interlayer Separation,” The IMAPS International Journal of Microcircuits and Electronic Packaging, Vol. 25, No. 1, 2002, pp. 160-177.