Micro and Nano-Cantilever Array with Integrated Piezoresistive Material for Biochemical Assay Patent

Provisional Patent, J. Zheng, K. Klein, and S. K. Sitaraman, "Micro and Nano-Cantilever Array with Integrated Piezoresistive Material for Biochemical Assay," Feb. 2005, Based on GTRC ID#3386

type: 
Provisional Patent
Year: 
2 005