Large Area Processing Using Small Area Substrates: A Low-Cost MCM-D Thin Film Processing

Citation: 
Bhattacharya, S. K., Sitaraman, S. K., Ume, I. C., Qu, J., Wong, C. P., Baldwin, D. F., and Tummala, R. R., “Large Area Processing Using Small Area Substrates: A Low-Cost MCM-D Thin Film Processing,” InterPACK, July 2001, IPACK2001-15527.